Vapor Deposition Instructions
START UP
1. Put knob in
MANUAL position.
2. Turn on
nitrogen on TANK (80 psi).
3. SYSTEM ON
switch. Make sure SYSTEM ON red light comes.
4. MECHANICAL
PUMP switch.
5. Turn
thermocouple gauge switch to FORELINE position.
6. When
FORELINE pressure goes to ~50 m torr, depress BACK VALVE switch.
7. Wait until
FORELINE pressure reads 30-40 m torr, then turn HI-VAC PUMP on. Allow pump to
achieve max speed (green light at the bottom will stop blinking when at max
speed, 1000).
8. When
FORELINE pressure goes to 20 m torr, close BACK VALVE and open ROUGH VALVE.
9. Turn
thermocouple selection switch to CHAMBER position.
AUTO VENT
1. Make sure
HIGH VACUUM GAUGE is OFF (Far right switch on the gray portion below the
Inficon deposition monitor).
2. Switch on
nitrogen on the 2nd tank and turn to AUTO VENT. (Rough valve will close and
back valve open automatically)
3. Wait until
vacuum has reduced to open chamber. Then switch off nitrogen on the 2nd tank.
Put slides in. Do not screw in holders too tight.
4. Put new Au
pieces to the holder on the left (3-4 depending on how much youÕre depositing,
and the size of the chips). It may be helpful to move the shutter to get better
depositions. To open the shutter, turn on Inficon monitor and depress OPEN
SHUTTER. Cr is good for 3-4 depositions. When Cr is green, remove it and put a
new batch in.
5. Turn on
ROTARY POWER on and leave it on for deposition (about 1/5 turn). Should check the following things before
close the door: (i) Gold (ii) Cr (iii) rotation (iv) crystal thickness (if
crystal thickness is >10%, change to a new one).
DEPOSITION:
1. Turn to
AUTO PUMP.
2. Turn on the
HIGH VACUUM GAUGE when the CHAMBER pressure goes below 0 m torr.
3. Add liquid
N2 and wait until HIGH VACUUM GAUGE gets to between 1E-6 and 1E-7 (lower the
better).
4. Turn on
Inficon deposition monitor, press PROGRAM toggle using the arrows to get to
FILM, select 1 for Cr, then ENTER to get back to main screen.
5. On VD
select RIGHT for Cr or LEFT for Au.
6. Turn on
water just a crack.
7. Turn on
FIL/GLOW power switch.
8. Deposit Cr
first. If height begins with negative number, ZERO it until only a positive
change in height is observed. Begin deposition by turning on current and slowly
moving it up. Cr deposits at 0.1 A/s, height 0.01 kA. When nearing 0.01 kA,
turn down current and turn off FIL/ GLOW power switch.
9. For Au,
Repeat step 7 &8, but remember to select 2 for Au on the Inficon monitor,
adjust VD to LEFT, and OPEN SHUTTER. Also, the Au deposits at 1.0 A/s, height
0.450 kA.
10. Turn off
FIL/GLOW power switch.
11. Wait 10 min,
then turn off HIGH VACUUM GAUGE and ROTARY POWER.
12. Turn on nitrogen
on the wall, then go to AUTO VENT.
13. Once the
pressure for the chamber door is released, turn the nitrogen off, and then open
the chamber door.
14. Take out your
slides, put the sample holder back to the top.
SHUTTING DOWN:
1. Turn off
water on the wall.
2. Move to
AUTO PUMP and wait until switches to BACK VALVE (the switching will happen
automatically). Thermocoupler gauge will go down to ~0 mtorr. Then to MANUAL.
3. Turn off
HIGH VAC PUMP. Wait until green light flashes (Wait at least 20 minutes for the
actual rotary to go to 0 Hz. The
green light will begin to flash around 100 Hz, so do NOT use this as an
indication to move on).
4. Turn off
MECHANICAL PUMP; turn off Inficon deposition monitor.
5. Manually
vent by using switch under the HIGH VACUUM GAUGE.
6. CONTROL OFF
and nitrogen on the TANK.